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Overview
Added this variation to meet the various needs of chemical liquid supply line
or semiconductor manufacturing equipment.
Variation Descriptions
• Water-hammer reduction type (L)
• Control pressure reduction type (V)
• Control pressure + water-hammer reduction type (VL)
Wide product line-up to meet the needs of semiconductor manufacturing line in the next generation.
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Items
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AMD*1H-*-L
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AMD*1H-*-V
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AMD*1H-*-VL
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Actuation |
N.C. (normally closed) type
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Working fluid |
Chemical liquids, pure water (Note 1)
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Fluid temperature °C |
5 to 40
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Withstanding pressure MPa |
1.4
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Working pressure range (A –> B) MPa |
0 to 0.7
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0 to 0.5
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0 to 0.5
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Back pressure MPa |
0 to 0.7
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0 to 0.5
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0 to 0.5
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Control pressure range MPa |
0.5 to 0.7
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0.4 to 0.6
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0.4 to 0.6
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Operating pressure connection port |
Rc1/8
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Ambient temperature °C |
0 to 40
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Frequency |
5 times/min. or less
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15 times/min. or less
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5 times/min. or less
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Water-hammer reduction type |
(Note 2)
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–
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(Note 2)
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Note 1: Confirm the compatibilities between the material of product, working fluid and working environment before operating.
Note 2: The response time of water-hammer reduction type is longer than standard type. Consult with CKD for more details.
Note 3: Refer to "How to order" for orifice diameter.
Courtesy of CKD
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