Yamatake Corporation has expanded its CMQ-V Series with a new low flow rate version of its CMQ-V Digital Mass Flow Controller for use with hydrogen and helium. This new CMQ-V Series (hydrogen) low flow rate model will be launched on September 22, 2008.

In order to realize high-speed control at low flow rates, a MEMS (Micro Electro Mechanical Systems) flow sensor was newly developed for the CMQ-V Series low flow rate model that was launched in January 2008. This product offers stable, high-speed flow control, unaffected by fluctuations in the gas supply pressure, backpressure, or furnace pressure. As a successful solution for customer requirements it has been well received by the market.

The new CMQ-V Series (hydrogen) low flow rate model has been developed specifically for use with hydrogen and helium. It is suited for applications that require low flow rate control of hydrogen in the 0.2～50mL/min range; included would be evaluation tests for the cell membranes of micro fuel cells, which are expected to become widely used for powering mobile phones, notebook computers, digital cameras and digital camcorders. This product would also be used with vacuum furnaces and deposition equipment, and for laboratory testing.

The CMQ-V Series Digital Mass Flow Controller (hydrogen) low flow rate model is priced from ¥230,000 per unit and it is planned to achieve annual sales of 1,000 units in 3 years.

Courtesy of Azbil